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Evaluation of Superficial and Dimensional Quality Features in Metallic Micro-Channels Manufactured by Micro-End-Milling

机译:通过微端面铣削制造的金属微通道的表面和尺寸质量特征的评估

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摘要

Miniaturization encourages the development of new manufacturing processes capable of fabricating features, like micro-channels, in order to use them for different applications, such as in fuel cells, heat exchangers, microfluidic devices and micro-electromechanical systems (MEMS). Many studies have been conducted on heat and fluid transfer in micro-channels, and they appeared significantly deviated from conventional theory, due to measurement errors and fabrication methods. The present research, in order to deal with this opportunity, is focused on a set of experiments in the micro-milling of channels made of aluminum, titanium alloys and stainless steel, varying parameters, such as spindle speed, depth of cut per pass (ap), channel depth (d), feed per tooth (fz) and coolant application. The experimental results were analyzed in terms of dimensional error, channel profile shape deviation from rectangular and surface quality (burr and roughness). The micro-milling process was capable of offering quality features required on the micro-channeled devices. Critical phenomena, like run-out, ploughing, minimum chip thickness and tool wear, were encountered as an explanation for the deviations in shape and for the surface quality of the micro-channels. The application of coolant and a low depth of cut per pass were significant to obtain better superficial quality features and a smaller dimensional error. In conclusion, the integration of superficial and geometrical features on the study of the quality of micro-channeled devices made of different metallic materials contributes to the understanding of the impact of calibrated cutting conditions in MEMS applications.
机译:小型化鼓励开发能够制造特征(例如微通道)的新制造工艺,以便将其用于不同的应用,例如燃料电池,热交换器,微流体设备和微机电系统(MEMS)。已经对微通道中的热和流体传递进行了许多研究,由于测量误差和制造方法,它们似乎与传统理论显着偏离。为了应对这一机遇,本研究着重于一组铝,钛合金和不锈钢制成的通道的微铣削实验,这些实验的参数各不相同,例如主轴转速,每道次切削深度( ap),通道深度(d),每齿进给量(fz)和冷却液用量。从尺寸误差,通道轮廓形状偏离矩形和表面质量(毛刺和粗糙度)方面分析了实验结果。微铣削过程能够提供微通道设备所需的高质量功能。遇到了诸如跳动,开槽,最小切屑厚度和刀具磨损之类的关键现象,以作为形状偏差和微通道表面质量的解释。为了获得更好的表面质量特征和较小的尺寸误差,冷却液的应用和每道次切削深度低很重要。总之,在研究由不同金属材料制成的微通道设备的质量时,表面和几何特征的整合有助于理解MEMS应用中校准切削条件的影响。

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