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Method using epitaxial transfer to integrate HAMR photonic integrated circuit (PIC) into recording head wafer
Method using epitaxial transfer to integrate HAMR photonic integrated circuit (PIC) into recording head wafer
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机译:使用外延转移将HAMR光子集成电路(PIC)集成到记录头晶片中的方法
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摘要
Embodiments of the present invention generally relate to a method for forming a HAMR device having a photonic integrated circuit that includes an optical detector, an optical emitter, and an optical element distinct from the optical detector and the optical emitter, where the elements of the photonic integrated circuit are aligned with a near field transducer. The method includes forming one or more layers on a substrate, bonding the layers to a partially fabricated recording head, removing the substrate using epitaxial lift-off, and forming the optical elements on the partially fabricated recording head.
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