1-chip-type MEMS microphone and method for making the 1-chip-type MEMS microphone

摘要

The present invention relates to a one-chip type MEMS microphone and a method of manufacturing the same. It is an object of the present invention to improve the structure of a conventional one-chip type MEMS microphone to reduce the number of parts and processes, Chip type MEMS microphone and a method of manufacturing the same.