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MAKING METHOD FOR 1-CHIP-TYPE MEMS MICROPHONE AND THE 1-CHIP-TYPE MEMS MICROPHONE BY THE METHOD

机译:1-芯片型MEMS麦克风的制作方法及1-芯片型MEMS麦克风的制作方法

摘要

The present invention relates to a 1-chip-type mems microphone and a method for manufacturing the same. The purpose of the present invention is to provide a 1-chip-type mems microphone and a method for manufacturing the same which can achieve performance improvement, sensitivity, cost reduction, rigidity reinforcement through component material replacement and a decrease in the number of components and processes by improving the structure of an existing 1-chip-type mems microphone.
机译:1芯片型记忆麦克风及其制造方法技术领域本发明涉及一种1芯片型记忆麦克风及其制造方法。本发明的目的是提供一种可以通过部件材料的替换以及部件数量和数量的减少来实现性能提高,灵敏度,成本降低,刚性增强的1-芯片型mems麦克风及其制造方法。通过改进现有的1芯片型mems麦克风的结构来实现这一过程。

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