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Methods of forming a FinFET semiconductor device with a unique gate configuration, and the resulting FinFET device

机译:形成具有独特栅极配置的FinFET半导体器件的方法以及所得的FinFET器件

摘要

One method disclosed includes, among other things, forming an overall fin structure having a stepped cross-sectional profile, the fin structure having an upper part and a lower part positioned under the upper part, wherein the upper part has a first width and the lower part has a second width that is less than the first width, forming a layer of insulating material in trenches adjacent the overall fin structure such that the upper part of the overall fin structure and a portion of the lower part of the overall fin structure are exposed above an upper surface of the layer of insulating material, and forming a gate structure around the exposed upper part of the overall fin structure and the exposed portion of the lower part of the overall fin structure.
机译:所公开的一种方法尤其包括形成具有阶梯状横截面轮廓的整体翅片结构,该翅片结构具有上部和下部,该下部位于上部下方,其中上部具有第一宽度,下部该部分具有小于第一宽度的第二宽度,从而在与整个鳍结构相邻的沟槽中形成绝缘材料层,使得整个鳍结构的上部和整个鳍结构的下部的一部分被暴露。在绝缘材料层的上表面上方形成栅结构,并在整个鳍结构的暴露的上部和整个鳍结构的下部的暴露的部分周围形成栅极结构。

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