APPLICATION OF ELECTRON-BEAM INDUCED PLASMA PROBES TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS

摘要

electron beam-induced plasma is used it is possible to establish a non-mechanical, electrical contact to the device of interest. The plasma source may be configured to provide a pole of a plasma can be referred to the atmospheric pressure plasma source and a very fine diameter and controllable properties. Plasma column functions as the electrical path to the element of interest in a manner that can be collected from the plasma source and the characteristic electrical signal is an atmospheric pressure device across the space between the elements of interest to the atmosphere. In addition, by controlling the gas flowing into the plasma column, and the probe it can be used for surface modification, etching, and deposition.