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A DONOR SUBSTRATE FOR DEPOSITING AN ORGANIC LAYER USING JOULE-HEATING

机译:用于通过焦耳加热沉积有机层的施主基质

摘要

The present invention provides a substrate, comprising: a substrate; depositing a conductive metal film on one surface of the substrate followed by patterning; forming a partition wall layer on the patterned conductive metal film; forming a photoresist on the partition wall layer; Removing the photoresist in a region corresponding to the patterned conductive metal film by a backside exposure process using the patterned conductive metal film as a mask on the opposite surface on which the film is deposited, A method of manufacturing an organic film barrier donor substrate for depositing an organic film by using a jelly including removing portions corresponding to the conductive metal film and removing the remaining photoresist, and a donor substrate manufactured thereby, There is provided a donor substrate structure capable of forming a uniform organic film pattern during the deposition of an organic film by using the donor substrate, and a method of manufacturing a donor substrate which can form a barrier pattern having a simple process and excellent pattern accuracy in order to obtain the donor substrate structure Can be.;
机译:本发明提供一种基板,其包括:基板;和在衬底的一个表面上沉积导电金属膜,然后构图;在图案化的导电金属膜上形成分隔壁层;在隔壁层上形成光刻胶;通过使用图案化导电金属膜作为掩模在其上沉积膜的相对表面上的背面曝光工艺,去除与图案化导电金属膜相对应的区域中的光致抗蚀剂,一种用于沉积有机膜阻挡施主基板的方法通过使用包括去除与导电金属膜相对应的部分的果冻的有机膜,并去除残留的光致抗蚀剂,以及由此制造的施主基板,提供了能够在有机物沉积期间形成均匀的有机膜图案的施主基板结构。通过使用施主基板形成膜,以及可以形成具有简单的工艺和优异的图案精度以形成施主基板结构的势垒图案的施主基板的制造方法。

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