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Apparatus for scanning nano structure with plural AFM probes and method thereof
Apparatus for scanning nano structure with plural AFM probes and method thereof
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机译:用多个原子力显微镜探针扫描纳米结构的装置及其方法
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摘要
Plural AFM probes with different resolutions are implemented on an apparatus for scanning a nearly free-standing nanometer-scale specimen. The apparatus identifies the location and the shape of the nano structure on a specimen piece using a high resolution AFM probe, and then measures a three-dimensional shape of the identified nano structure using an atomic resolution AFM probe.
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