AFM APPARATUS FOR SCANNING NANO STRUCTURE WITH PLURAL AFM PROBES AND METHOD THEREOF

摘要

According to the present invention, an independent nanostructure scanning apparatus having a plurality of AFM probes having different resolutions is implemented, and the position and shape of the nanostructure on the nanostructure are confirmed by using a high-resolution AFM probe in the scanning apparatus, Atom resolution for the structure By measuring the three-dimensional shape through AFM probe, more precise measurement of the nanostructure is possible.