INTEGRATED THREE-AXIS MEMS GYRO SENSOR WITH Z-SHAPED COUPLING STRUCTURE

摘要

The present invention relates to an integrated three-axis MEMS gyro sensor with a z-shaped coupling structure where driving mass units connected to each other among the driving mass units are vibrated in opposite directions. According to the present invention, residual stress generated in a portion where coupling spring is connected to a driving mass is reduced; thereby easily manufacturing the gyro sensor with increased durability.;COPYRIGHT KIPO 2017