Integrated structure of MEMS pressure sensor and MEMS inertial sensor

摘要

The present invention discloses an integrated structure of a MEMS pressure sensor and a MEMS inertial sensor. An insulating layer formed on the substrate, each including a first lower electrode and a second lower electrode formed on the insulating layer, and further, a first upper electrode constituting a barometric pressure sensing capacitor together with the first lower electrode, and a second An inertial sensing structure that includes a second upper electrode that constitutes a standard capacitor together with the lower electrode and is supported above the substrate via a third support, and a fixed pole that constitutes an inertial detection capacitor of the inertial sensor together with the inertial sensing structure And a cover for packaging an inertial detection capacitor constituted by an inertial sensing structure and a fixed plate on the substrate. The integrated structure of the present invention integrates the MEMS inertial sensor and the MEMS pressure sensor on the same substrate, thereby effectively reducing the area of the chip and reducing the cost of the chip. The entire package can be accomplished, reducing the cost of the chip package.