The present invention discloses an MEMS pressure sensor, MEMS inertial sensor integrated structure. Wherein the integrated structure includes an insulating layer formed on a substrate, a first lower electrode and a second lower electrode all formed on the insulating layer; And a second upper electrode constituting a reference capacitor together with a first upper electrode and a second lower electrode constituting a pressure sensitive capacitor together with the first lower electrode; Further comprising a fixed electrode plate constituting an inertial sensing capacitor of the inertial sensor together with an inertia sensitive structure and an inertia sensitive structure supported above the substrate through the third support portion; Here, the cover further includes an inertia sensitive structure and a cover for mounting the inertial detection capacitor composed of the fixed electrode plate on the substrate. By integrating the MEMS inertial sensor and the MEMS pressure sensor on the same substrate, the integrated structure of the present invention can effectively reduce the area of the chip, thereby lowering the cost of the chip, and the entire chip can be mounted through the primary mounting And the cost of mounting the chip can be reduced.
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