机译:A Two-Scale Multi-Physics Deep Learning Model for Smart MEMS Sensors
Department of Civil and Environmental Engineering Politecnico di Milano Milano ItalyDepartment of Mechanical Engineering Universidad de Costa Rica Rodrigo Facio Brenes Campus San José Costa Rica;
Department of Civil and Environmental Engineering Politecnico di Milano Milano Italy;
Machine Learning; Artificial Neural Networks; Polysilicon MEMS; Uncer-tainty Quantification; Lorentz Force Magnetometer;