MEMS PRESSURE SENSOR AND MEMS INERTIAL SENSOR INTEGRATION STRUCTURE

摘要

To provide new technical solution means for an integrated structure of an MEMS pressure sensor and an MEMS inertia sensor.SOLUTION: An integrated structure of an MEMS pressure sensor and an MEMS inertia sensor: comprises an insulating layer 2 formed on a substrate 1, a first lower electrode 3a and a second lower electrode 3b both formed on the insulating layer; further comprises a first upper electrode 4a forming an air pressure-sensitive capacitor together with the first lower electrode, and a second upper electrode 4b forming a standard capacitor together with the second lower electrode; further comprises an inertia-sensitive structure 4c supported above the substrate via a third support part 7c, and a fixed electrode plate forming an inertia detecting capacitor of an inertia sensor together with the inertia-sensitive structure; and further comprises a cover 8 which packages the inertia detecting capacitor composed of the inertia-sensitive structure and the fixed electrode plate on the substrate.SELECTED DRAWING: Figure 1