ELECTRO-MECHANICAL COUPLING ANALYSIS OF MEMS STRUCTURES BY BOUNDARY ELEMENT METHOD

摘要

In this paper, we present the applications of Boundary Element Method (BEM)to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems (MEMS).The algorithm is programmed in our research group based on BEM modeling for electrostatics and elastostatics. Good agreement is shown while the simulation results of the pull-in voltages are compared with the theoretical/experimental ones for some examples.