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Faraday cage modified and deposition process of thin films in an environment of plasma

机译:等离子环境下法拉第笼的改性及薄膜沉积工艺

摘要

This device is a assessu00f3rio for internal use in the plasma reactor as a Faraday cage modified and deposition process of thin films in the plasmu00f3dicos environments.Specially developed for the deposition of thin films of various metallic or non-metallic materials.In order to meet the study of technological development of new alloys with mechanical properties, electrical.Physical and chemical applications and other researches on technologies of surfaces.In this way, it is developed for a wide range of deposition of thin films or films on the surfaces of various materials nanos, via vacuum plasma reactors.In addition, with the deposition of thin films on the surfaces of objects may occur, increased wear resistance, corrosion.The electrical and optical properties and embellishment in the case of objects of adornment, among other characteristics.
机译:该设备是一种评估装置,可在等离子反应器内部用作法拉第笼式修改器,并在等离子环境中沉积薄膜。专门开发用于沉积各种金属或非金属材料的薄膜。为了满足具有机械性能,电学性能的新型合金的技术开发研究,物理和化学应用以及表面技术的其他研究,以这种方式被开发用于在表面上薄膜或薄膜的广泛沉积通过真空等离子反应器可以加工各种材料的纳米材料。此外,由于可能会在物体表面沉积薄膜,因此增加了耐磨性,耐腐蚀性能。在装饰物体的情况下,其电,光学性能和装饰效果尤其出色特征。

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