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Wafer edge partial die engineered for stacked die yield
Wafer edge partial die engineered for stacked die yield
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机译:晶圆边缘局部模具经过专门设计,可提高叠层模具的成品率
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摘要
A stacked wafer assembly and method for fabricating the same are described herein. In one example, a stacked wafer assembly includes a first wafer bonded to a second wafer. The first wafer includes a plurality of fully functional dies and a first partial die formed thereon. The second wafer includes a plurality of fully functional dies and a first partial die formed thereon. Bond pads formed over an inductor of the first partial die of the first wafer are bonded to bond pads formed on the first partial die of the second wafer to establish electrical connection therebetween.
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