ELECTRICAL CONTACT AUTO-ALIGNMENT STRATEGY FOR HIGHLY PARALLEL ARRAYS IN CANTILEVER FREE SCANNING PROBE LITHOGRAPHY

摘要

Disclosed embodiments provide an electrical contact alignment strategy for leveling an array of probes, pens, tips, etc., in relationship to a substrate, for example, wherein a plurality of independent electrical circuits are formed by configuring regions of the array and substrate regions to be partially conductive and connected to opposite electrodes or vice versa.