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Deflection efficiency of self-transducing, self-sensing cantilevers suitable for fast-AFM, scanning probe lithography and array operation

机译：适用于快速原子力显微镜，扫描探针光刻和阵列操作的自转换，自感应悬臂的偏转效率

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Rangelow I.W.; Ivanov T.; Hofer M.; Angelov T.; Holz M.; Lenk S.; Atanasov I.; Kaestener M.; Guliyev E.; Roeser D.; Gutschmidt S.; Sattel S.; Ahmad A.;
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年度 2015
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正文语种 en
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1. Controllable off-plane deflection of cantilevers for multiple scanning proximity probe arrays [J] . Y. Sarov, T. Ivanov, A. Frank, Applied Physics A: Materials Science & Processing . 2008,第3期

机译：用于多个扫描接近探头阵列的悬臂的可控离面偏转
2. Deformation of elastomeric pyramid pen arrays in cantilever‐free scanning probe lithography [J] . Liu Shuangping, Olvera de la Cruz Monica Journal of Polymer Science, Part B. Polymer Physics . 2018,第9期

机译：无悬臂扫描探针光刻中弹性型金字塔笔阵列的变形
3. 3D metrology with a compact scanning probe microscope based on self-sensing cantilever probes [J] . Dal Savio C, Dejima S, Danzebrink HU, Measurement Science & Technology . 2007,第1期

机译：紧凑型扫描探针显微镜（基于自感应悬臂探针）的3D计量
4. Field-Emission Scanning Probe Lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions [C] . Ivo W. Rangelow, Claudia Lenk, Martin Hofmann, SPIE Advanced Lithography Conference . 2018

机译：具有自驱动和自感应悬臂的场发射扫描探针光刻技术，用于单位数纳米尺寸的设备
5. Tools and Methods for High-Throughput Materials Synthesis Using Cantilever-Free Scanning Probe Lithography [D] . Golnabi, Rustin. 2021

机译：使用无悬臂扫描探针光刻的高通量材料合成的工具和方法
6. Multifunctional cantilever-free scanning probe arrays coated with multilayer graphene [O] . Wooyoung Shim, Keith A. Brown, Xiaozhu Zhou, 2012

机译：多层石墨烯涂层的多功能无悬臂扫描探针阵列
7. Single-molecule protein arrays enabled by scanning probe block copolymer lithography [O] . Chai, Jinan, Wong, Lu Shin, Giam, Louise, 2011

机译：通过扫描探针嵌段共聚物光刻实现单分子蛋白质阵列
8. Scanning Probe Lithography. 1. Scanning Tunneling Microscope-Induced Lithography of Self-Assembled n-Alkanethiol Monolayer Resists. [R] . Ross, C. B., Sun, L., Crooks, R. M. 1993

机译：扫描探针光刻。 1.扫描隧道显微镜诱导的自组装正烷硫醇单层抗蚀剂的光刻。

Deflection efficiency of self-transducing, self-sensing cantilevers suitable for fast-AFM, scanning probe lithography and array operation

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