This research developed an individually driving one-dimensional (1-D) multi-probes cantilever array used in a scanning probe parallel nano writing system. The multi-probes cantilever array comprises two kinds of probes for writing and imaging. The writing probes each have thermal actuators for an on-off switch of contact between probes and a sample surface, whereas imaging probes function as a piezoresistive sensor for detecting a deflection of the cantilever array. This study prepared several kinds of writing probes by changing the electrical heater pattern of the actuators and the cantilever length, based on electro thermo-mechanical coupled FE simulations. Consequently, we were able to determine a better design for the multi-probes cantilever array.
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