Deformation of elastomeric pyramid pen arrays in cantilever‐free scanning probe lithography

Liu Shuangping; Olvera de la Cruz Monica

摘要

ABSTRACT > Cantilever‐free scanning probe lithography (SPL) employs soft elastomeric pen arrays to deliver material or energy to a surface to achieve a high‐resolution, high‐throughput, and low‐cost nanopatterning. In particular, microscale elastomeric pyramid pen arrays are often adopted as the cantilever‐free architecture owing to their distinct structural and mechanical properties. To better understand the mechanical behavior of the elastomeric pyramid pen array during the lithographic printing process, we numerically investigate the compression of an elastomeric pyramid array in a nonadhesive and frictionless contact with a rigid substrate. Simple scaling laws of the width of the contact surface with respect to the compression displacement and force are found and compared with previous models and experiments. By changing the interpyramid distance or the thickness of the base of the pyramid array, increasing deviations from the established scaling laws are observed and explained. Furthermore, we demonstrate that the unique morphology of a compressed pyramid primarily determines the unusual shape of the features fabricated by a specific cantilever‐free SPL technique. ? 2018 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2018 , 56 , 731–738 </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract XMLNS =“http://www.wiley.com/namespaces/wiley”type =“main”> <title type =“main”>抽象</ title> >无悬臂扫描探头光刻（spl）使用软弹性笔阵列将材料或能量输送到表面以实现高分辨率，高通量和低成本的纳米件。特别地，由于其不同的结构和机械性能，通常采用微观弹性金字塔金字塔阵列。为了更好地理解弹性型金字塔阵列在平版印刷过程中的机械特性，我们在与刚性基板的非粘附性和无摩擦接触中的弹性体金字塔阵列的压缩性研究。发现并与先前的模型和实验相比，找到了接触表面宽度的简单缩放规律。通过改变金字塔阵列的底座的逆框距离或厚度，观察并解释了越来越多的缩放法律的偏差。此外，我们证明压缩金字塔的独特形态主要决定了由特定悬臂的SPL技术制造的特征的异形形状。还2018 Wiley期刊，Inc .J.Colom。 SCI。，B部分：聚合物。物理。 2018 </ b>， 56 </ i>，731-738 </ p> </ abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-35627/'>《Journal of Polymer Science, Part B. Polymer Physics》</a> <b style="margin: 0 2px;">|</b><span>2018年第9期</span><b style="margin: 0 2px;">|</b><span>共8页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Liu Shuangping&option=202" target="_blank" rel="nofollow">Liu Shuangping;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Olvera de la Cruz Monica&option=202" target="_blank" rel="nofollow">Olvera de la Cruz Monica;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Department of Materials Science and EngineeringNorthwestern UniversityEvanston Illinois 60208;</p> <p>Department of Materials Science and EngineeringNorthwestern UniversityEvanston Illinois 60208;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/1185.html" title="高分子化学（高聚物）">高分子化学（高聚物）;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=contact surface&option=203" rel="nofollow">contact surface;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=deformation&option=203" rel="nofollow">deformation;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=finite element analysis&option=203" rel="nofollow">finite element analysis;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=nanopatterning&option=203" rel="nofollow">nanopatterning;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=pyramid array&option=203" rel="nofollow">pyramid array;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=scanning probe lithography&option=203" rel="nofollow">scanning probe lithography;</a> </p> <div class="translation"> 机译：接触表面;变形;有限元分析;纳米透明理由;金字塔阵列;扫描探针光刻; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704025811064.html">Deformation of elastomeric pyramid pen arrays in cantilever‐free scanning probe lithography</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Liu Shuangping&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Liu Shuangping,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Olvera de la Cruz Monica&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Olvera de la Cruz Monica </a> <a href="/journal-foreign-35627/" target="_blank" rel="nofollow" class="tuijian_authcolor">Journal of Polymer Science, Part B. 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ICDE 2005. .</a> <span>2005</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：使用扫描探针光刻和各向异性湿法刻蚀在100硅片上制造超高密度纳米金字塔阵列（NPA）</span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/academic-degree-foreign_mphd_thesis/02061907671.html">Tools and Methods for High-Throughput Materials Synthesis Using Cantilever-Free Scanning Probe Lithography</a> <b>[D] </b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Golnabi, Rustin.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Golnabi, Rustin. </a> <span>2021</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：使用无悬臂扫描探针光刻的高通量材料合成的工具和方法</span> </p> </li> <li> <div> <b>6. </b><a class="enjiyixqcontent" href="/academic-journal-foreign-pmc_detail_thesis/040002288820.html">Multifunctional cantilever-free scanning probe arrays coated with multilayer graphene</a> <b>[O] </b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wooyoung Shim&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Wooyoung Shim,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Keith A. Brown&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Keith A. Brown,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Xiaozhu Zhou&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Xiaozhu Zhou,</a> <span>2012</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：多层石墨烯涂层的多功能无悬臂扫描探针阵列</span> </p> </li> <li> <div> <b>7. </b><a class="enjiyixqcontent" href="/open-access_resources_thesis/0100012280314.html">Deflection efficiency of self-transducing, self-sensing cantilevers suitable for fast-AFM, scanning probe lithography and array operation</a> <b>[O] </b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Rangelow I.W.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Rangelow I.W.,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Ivanov T.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Ivanov T.,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Hofer M.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Hofer M.,</a> <span>2015</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：适用于快速原子力显微镜，扫描探针光刻和阵列操作的自转换，自感应悬臂的偏转效率</span> </p> </li> <li> <div> <b>8. </b><a class="enjiyixqcontent" href="/ntis-science-report_ad_thesis/020711141915.html">Scanning Probe Lithography. 1. Scanning Tunneling Microscope-Induced Lithography of Self-Assembled n-Alkanethiol Monolayer Resists.</a> <b>[R] </b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Ross, C. B.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Ross, C. B.,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext= Sun, L.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> Sun, L.,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext= Crooks, R. M.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> Crooks, R. M. </a> <span>1993</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：扫描探针光刻。 1.扫描隧道显微镜诱导的自组装正烷硫醇单层抗蚀剂的光刻。</span> </p> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/academic-journal-cn_detail_thesis/0201293856326.html">集成悬臂梁／探针阵列在PMMA薄膜上微纳摩擦的尺寸和温度效应</a> <b>[J]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=刘斌&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 刘斌</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=鲍海飞&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,鲍海飞</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=李昕欣&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,李昕欣</a> <span> <a href="/journal-cn-57464/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 功能材料与器件学报 </a> </span> <span> . 2007</span><span>,第6期</span> </span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/academic-journal-cn_equipment-electronic-products-manufacturing_thesis/0201273608866.html">浸没式阵列激光扫描直写光刻</a> <b>[J]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=徐端颐&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 徐端颐</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=范晓冬&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,范晓冬</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=蒋培军&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,蒋培军</a> <span> <a href="/journal-cn-8713/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 电子工业专用设备 </a> </span> <span> . 2008</span><span>,第010期</span> </span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" 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