Manufacturing method of refractory metal carbide and refractory metal carbide

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a refractory metal carbide capable of forming a thick and uniform C-containing layer. SOLUTION: The atmosphere of a vacuum heat treatment furnace 10 is set as a reducing atmosphere, and heat treatment is performed so that a felt member 21 made of carbon fibers having a high bulk density covers a member 20 to be carbonized. As a result, the reducing atmosphere gas passes through the felt member 21 made of highly permeable carbon fibers, and during the passage, it reaches the carbonized member 20 while being in contact with the carbon fibers over a wide area. Then, a large amount of C-containing gas formed by reacting with carbon in the carbon fiber together with the reducing atmosphere gas, specifically, a hydrocarbon gas is also supplied, and on the surface of the member 20 to be carbonized, the reducing atmosphere gas or the hydrocarbon gas is supplied. It becomes an atmosphere. Therefore, it is possible to form a thicker C-containing layer more uniformly than when a carbon substrate is used. [Selection diagram] Fig. 1