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Integrated circuits and methods for fabricating integrated circuits with magnetic tunnel junction (MTJ) structures

机译:具有磁性隧道结(MTJ)结构的集成电路和制造集成电路的方法

摘要

Integrated circuits and methods for fabricating magnetic tunnel junction (MTJ) structures and integrated circuits are provided. An exemplary method for fabricating an integrated circuit including a magnetic tunnel junction (MTJ) structure includes forming magnetic tunnel junction (MTJ) layers over a substrate. Further, the method includes forming a conductive pillar over the MTJ layers, wherein the conductive pillar is formed with an uppermost surface, and wherein the uppermost surface is not planarized. Also, the method includes etching the MTJ layers to form a pillar structure from portions of the MTJ layers underlying the conductive pillar.
机译:提供了用于制造磁性隧道结(MTJ)结构和集成电路的集成电路和方法。用于制造包括磁隧道结(MTJ)结构的集成电路的示例性方法包括在衬底上方形成磁隧道结(MTJ)层。此外,该方法包括在MTJ层上方形成导电柱,其中,导电柱形成有最上表面,并且其中最上表面没有被平坦化。而且,该方法包括蚀刻MTJ层以从导电柱下面的MTJ层的部分形成柱结构。

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