FLEXIBLE SUBSTRATE FILM BULK ACOUSTIC RESONATOR AND FORMING METHOD THEREFOR

摘要

A flexible substrate film bulk acoustic resonator and a forming method therefor conducive to raising the Q value of the resonator and improving the performance of the resonator. The forming method for the flexible substrate film bulk acoustic resonator comprises: a sacrificial layer (1101) is provided; a resonating structure (214) is formed on the sacrificial layer (1101); an upper acoustic reflection structure (210) is formed on the resonating structure (214); the sacrificial layer (1101) is removed, thereby obtaining a stacked structure, and then the stacked structure is transferred onto a flexible substrate (219) by means of a flipping process, the stacked structure comprising the resonating structure (214) and the upper acoustic reflection structure (210); and an encapsulating layer (201) is formed on the upper acoustic reflection structure (210).