FLEXIBLE SUBSTRATE FILM BULK ACOUSTIC RESONATOR AND FORMING METHOD THEREFOR

摘要

Provided are a flexible substrate film bulk acoustic resonator (200, 300, 400, 500, 700, 800) and a forming method therefor, which is helpful to increase the Q value of the device and improve the performance of the device, and can reduce the cost for processing and manufacturing the device. The flexible substrate film bulk acoustic resonator (200, 300, 400, 500, 700, 800) comprises: a flexible substrate (215, 311, 409, 511, 615, 721, 815), a bottom acoustic reflection layer, and a resonant structure, wherein the bottom acoustic reflection layer is located above the flexible substrate (215, 311, 409, 511, 615, 721, 815), and the resonant structure is located above the bottom acoustic reflection layer.