The teaching device receives the position signal from the arm side position sensor, the dummy wafer loaded on the stage, the dummy wafer side position sensor provided on the dummy wafer, and the arm side position sensor to receive the arm position sensor. It is provided with a signal receiving unit for obtaining the position coordinates of, and receiving the position signal from the dummy wafer side position sensor to obtain the position coordinates of the dummy wafer side position sensor. The control unit calculates the position coordinates of the arm side position sensor when the arm grips the wafer based on the position coordinates of the dummy wafer side position sensor, and moves the arm so that the arm side position sensor moves to the calculated position coordinate.
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