Flexure-based nanopositioning systems : integrated design and control

摘要

This thesis deals with the design and control of flexure-based mechanisms for applications requiring multi-degree-of-freedom positioning and alignment. Example applications include positioning a probe or sample in atomic force microscopy, alignment of tool and sample in stamping processes, and fine-positioning of wafer steppers in semiconductor manufacturing. Such applications necessitate nanopositioning systems that satisfy critical functional requirements, such as load-capacity, bandwidth, resolution, and range. Therefore, a systematic approach for design and control is an important tool for research and development for flexure-based nanopositioning systems. In this thesis, a novel methodology is presented for generating flexure-based topologies that can meet performance requirements, such as those dictating structural strength or dynamical behavior. We present performance metrics that allow for the generation of topologies that are tuned for a desired level of structural strength or modal separation. The topology generation is aimed as a valuable addition to the design toolkit, facilitating novel designs that could not have been conceived otherwise. The parameters within any particular topology could be adjusted at a subsequent phase through a detailed shape and size optimization. The thesis also proposes a controller generation approach. Unlike existing controller parameterizations, a novel parameterization formulated in this thesis allows for directly tuning the sensitivity transfer function of the closed-loop system. Tuning sensitivity is critical in mitigating the effects of disturbances affecting the system, as well as those arising from cross-coupling and parasitic error motions. Further, an integrated methodology for design and control is presented. This methodology uses the design topology generation approach and controller generation approach proposed in the thesis. The key distinction of our design for control approach is that the design is iterated over topologies and not just parameters within a selected topology. A simple one-degree-of-freedom positioning system example is worked out to detail the steps of the proposed integrated design and control methodology. A novel design topology that is ideally suited for achieving a desired design and control performance is derived using this methodology. Finally, the hardware design and control of a novel flexure-based nanopositioner implementation for scanning probe microscopy are presented to illustrate the effectiveness of the approaches discussed in this thesis.