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MULTI-ACTUATOR DESIGN AND CONTROL FOR A HIGH-SPEED/LARGE-RANGE NANOPOSITIONING SYSTEM
MULTI-ACTUATOR DESIGN AND CONTROL FOR A HIGH-SPEED/LARGE-RANGE NANOPOSITIONING SYSTEM
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机译:高速/大范围纳米定位系统的多执行器设计与控制
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摘要
Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.
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