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Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2

机译:高温复合材料Aln-TIB2-TISI2的组合反应性/非反应性DC磁控溅射

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摘要

High temperature composite target AlN–TiB2–TiSi2 with heterogeneous distribution of compounds (AlN—50 wt.%; TiB2—35 wt.%; TiSi2—15 wt.%) is used for sputtering via combined reactive/non-reactive DC magnetron sputtering onto substrate materials either cylindrical polished steel (Fe, 18%—Ni, 12%—Cr, 10%—Ti) 3 mm diameter or monocrystalline silicon. The gradient coating has been produced by sequential non-reactive and reactive sputtering of the target. The structural and morphological properties of the deposited films are analyzed by transmission electron microscopy, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. The tribo-mechanical properties are studied by means of nanoindentation and nanowear tests. The gradient film is composed of two layers with different microstructure and elemental composition. The first layer with thickness ~200 nm is mainly based on light B, C and N as well metal elements Al, Si and Ti. The presence of very well distributed nanocrystals embedded in an amorphous matrix, with crystal sizes ranging from 5 to 40 nm is observed in the second layer ~700 nm thickness and composed of Al, Ti, Si, B, and N. Films show very flat surfaces, with roughness around 0.35 nm. The hardness, elastic modulus, elastic recovery (We), H/E⁎ ratio and H3ud/E⁎2 ratio are determined as 17.55 GPa, 216.7 GPa, 60%, 0.08 and 0.12 GPa, respectively. Nanowear tests demonstrate relatively high wear resistance of the coatings. Samples show promising characteristics for hard protective adaptive coatings and diffusion barriers due to short propagation of dislocations in the amorphous matrix and the elastic and hard nature of the nanocomposite structure.
机译:具有化合物异质分布的高温复合靶材AlN–TiB2-TiSi2(AlN–50 wt。%; TiB2–35 wt。%; TiSi2–15 wt。%)用于通过反应性/非反应性直流磁控溅射法进行溅射将直径3 mm的圆柱形抛光钢(Fe,18%-Ni,12%-Cr,10%-Ti)或单晶硅涂在基材上。梯度涂层是通过依次对靶进行非反应性和反应性溅射制备的。通过透射电子显微镜,扫描电子显微镜,原子力显微镜,X射线光电子能谱和拉曼光谱来分析沉积膜的结构和形态特性。通过纳米压痕和纳米磨损试验研究了摩擦机械性能。梯度膜由具有不同微观结构和元素组成的两层组成。厚度约为200 nm的第一层主要基于光B,C和N以及金属元素Al,Si和Ti。在第二层(约700 nm厚)中观察到存在分布在无定形基质中的分布非常均匀的纳米晶体,晶体尺寸为5至40 nm,并且由Al,Ti,Si,B和N组成。薄膜显示非常平坦表面,粗糙度约为0.35 nm。硬度,弹性模量,弹性回复率(We),H /E⁎比和H3 ud /E⁎2比分别确定为17.55 GPa,216.7 GPa,60%,0.08和0.12 GPa。纳米磨损测试表明涂层具有较高的耐磨性。样品由于位错在无定形基体中的短时传播以及纳米复合结构的弹性和坚硬特性,显示出对硬质保护性自适应涂层和扩散阻挡层有希望的特性。

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