This data in brief presents displacement measurements acquired from a piezoelectric cantilevered actuator when subjected to harmonic excitations. The micro displacements are measured with optical sensors. The dataset has been used recently for the purpose of nonlinear black-box modelling, where the hysteretic behaviour of such devices has been modelled [1,2]. We hope to enable reproducibility by sharing the data used in [1,2], which are previous works by the authors, allowing the comparison of new methods on a common basis. Additionally, researchers interested in piezoelectric actuators for high precision tasks may also benefit on working with the present dataset. Keywords: Micromanipulators, System identification, Piezoelectric actuator, Mechatronics
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