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Effect of Inhomogeneous Acid Distribution on Line Edge Roughness-Relationship to Line Edge Roughness Originating from Chemical Gradient

机译：非均匀酸分布对源自化学梯度的线边缘粗糙度关系的影响

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Takahiro Kozawa; Hiroki Yamamoto; Seiichi Tagawa;
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1. Effect of Inhomogeneous Acid Distribution on Line Edge Roughness- Relationship to Line Edge Roughness Originating from Chemical Gradient [J] . Takahiro Kozawa, Hiroki Yamamoto, Seiichi Tagawa Journal of Photopolymer Science and Technology . 2010,第5期

机译：不均匀酸分布对线边缘粗糙度的影响-与源自化学梯度的线边缘粗糙度的关系
2. Effect of Inhomogeneous Acid Distribution on Line Edge Roughness- Relationship to Line Edge Roughness Originating from Chemical Gradient [J] . Takahiro Kozawa, Hiroki Yamamoto, Seiichi Tagawa Journal of Photopolymer Science and Technology . 2010,第5期

机译：不均匀酸分布对线边缘粗糙度的影响-与源自化学梯度的线边缘粗糙度的关系
3. Understanding The Effects Of Photoacid Distribution Homogeneity And Diffusivity On Critical Dimension Control And Line Edge Roughness In Chemically Amplified Resists [J] . Cheng-Tsung Lee, Richard A. Lawson, Clifford L. Henderson Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2008,第6期

机译：了解光酸分布均匀性和扩散性对化学放大抗蚀剂中的临界尺寸控制和线边缘粗糙度的影响
4. The Effects of Chemical Gradients and Photoresist Composition on Lithographically Generated Line Edge Roughness [C] . Timothy B. Michaelson, Adam R. Pawloski, Alden Acheta, Advances in Resist Technology and Processing XXII pt.1 . 2005

机译：化学梯度和光刻胶成分对光刻产生的线边缘粗糙度的影响
5. Mask Roughness Induced Line-Edge Roughness in Extreme Ultraviolet Lithography [D] . McClinton, Brittany 2011

机译：极紫外光刻中掩模的粗糙度引起的线边缘粗糙度
6. Fabricating a high-resolution mask with improved line-edge roughness by using a nonchemically amplified resist and a postexposure bake [O] . Hidetatsu Miyoshi, Jun Taniguchi -1

机译：通过使用非化学放大的抗蚀剂和曝光后烘烤来制造具有改善的线边缘粗糙度的高分辨率掩模
7. Corrigendum to “Blurred edges look faint, and faint edges look sharp: The effect of a gradient threshold in a multi-scale edge coding model” Vision Res. 47(13) (2007) 1705–1720 [O] . May Keith A., Georgeson Mark A. 2010

机译：更正为“模糊的边缘看起来很模糊，而模糊的边缘看起来很锐利：梯度阈值在多尺度边缘编码模型中的作用”。 47（13）（2007）1705–1720
8. The Distribution of Stress Near the Tip of a Crack Which Originates at the Edge of a Circular Hole [R] . Tweed, J. 1972

机译：圆孔边缘裂纹尖端附近的应力分布

Effect of Inhomogeneous Acid Distribution on Line Edge Roughness-Relationship to Line Edge Roughness Originating from Chemical Gradient

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