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Development of the Transmittance Measurement for EUV Resist by Direct-Resist Coating on a Photodiode

机译：通过光电二极管的直接抗蚀剂涂层开发EUV抗蚀剂的透射率测量

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Daiki Mamezaki; Masanori Watanabe; Tetsuo Harada; Takeo Watanabe;
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1. Development of the Transmittance Measurement for EUV Resist by Direct-Resist Coating on a Photodiode [J] . Mamezaki Daiki, Watanabe Masanori, Harada Tetsuo, Journal of Photopolymer Science and Technology . 2016,第5期

机译：通过光电二极管上的直接抗蚀涂层对EUV抗蚀剂的透射率测量的开发
2. Development of the Transmittance Measurement for EUV Resist by Direct-Resist Coating on a Photodiode [J] . Daiki Mamezaki, Masanori Watanabe, Tetsuo Harada, Journal of Photopolymer Science and Technology . 2016,第5期

机译：通过光电二极管上的直接抗蚀涂层对EUV抗蚀剂的透射率测量的开发
3. Absorption Coefficient Measurement Advanced Method of EUV Resist by Direct-Resist Coating on a Photodiode [J] . Shota Niihara, Daiki Mamezaki, Masanori Watanabe, Journal of Photopolymer Science and Technology . 2017,第1期

机译：在光电二极管上进行直接抗蚀涂层的EUV抗蚀剂吸收系数测量的先进方法
4. Development of absorption-coefficient-measurement method of EUV resist by direct-resist coating on a photodiode [C] . Shota Niihara, Tetsuo Harada, Takeo Watanabe International conference on extreme ultraviolet lithography . 2018

机译：在光电二极管上进行直接抗蚀涂层的EUV抗蚀剂吸收系数测量方法的发展
5. Resistivity and Optical Transmittance Simulation on Metal Embedded Transparent Conducting Oxide Thin Films [D] . Fang, Chia-Ling 2012

机译：金属嵌入式透明导电氧化物薄膜的电阻率和透光率模拟
6. Increasing Fracture Toughness and Transmittance of Transparent Ceramics using Functional Low-Thermal Expansion Coatings [O] . Marc Rubat du Merac, Martin Bram, Jürgen Malzbender, -1

机译：使用功能性低热膨胀涂层增加透明陶瓷的断裂韧性和透光率
7. Absorption Coefficient Measurement Advanced Method of EUV Resist by Direct-Resist Coating on a Photodiode [O] . Shota Niihara, Daiki Mamezaki, Masanori Watanabe, 2017

机译：光电二极管直接抗蚀剂涂层的吸收系数测量EUV抗蚀剂

Development of the Transmittance Measurement for EUV Resist by Direct-Resist Coating on a Photodiode

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