High-Q Tunable Capacitors and Multi-Way Switches Using Microelectromechanical Systems (MEMS) for Millimeter-Wave Applications

摘要

The objective of this project was to design new, innovative microelectromechanical systems (MEMS) to create high-Q tunable capacitors and switches that were superior to the existing on/off switches. The concept was feasible; however, it was very challenging to design and/or process MEMS to meet specific requirements balancing mm-wave and electro -mechanical performance measures, such as quality factor (Q), capacitance range, switching complexity, dynamic response, and reliability. Therefore, we planned to conduct in-depth synthesis and analysis to develop representative, well-characterized, MEMS- based, high-Q turnable capacitors, switches, and their mm-wave modules. We have successfully demonstrated innovative RF MEMS switches and variable capacitors and the associated knowledge and technology. The devices and subsystems demonstrated have confirmed the great potential of RF MEMS. More importantly, the knowledge and technologies developed for the design, packaging, and reliability of RF MEMS will assist the industry to develop cost-effective, reliable RF MEMS to support the advancement of military systems. Five major accomplishments are summarized in this report.