Stroboscopic Imaging Interferometer for MEMS Performance Measurement

摘要

The insertion of MEMS components into aerospace systems requires advanced testing to characterize performance in a space environment. Here we report a novel stroboscopic interferometer test system that measures nanometer- scale displacements of moving MEMS devices. By combining video imagery and phase-shift interferometry with an environmental chamber, rapid visualization of the dynamic device motion under the actual operational conditions can be measured. The utility of this system is further enhanced by integrating the interferometer onto the chamber window, allowing for robust interferometric testing in a noisy environment without requiring a floating optical table. To demonstrate these unique capabilities, we present the time-resolved images of an electrostatically actuated MEMS cantilevered beam showing the first- through sixth-order plate modes under vacuum.