Integrated Circuit Reliability and Manufacturing Science Program.

摘要

The report describes results of a study aimed at lowering the cost of high-reliability integrated circuits. The circuit family chosen for the study was RCA's CMOS product line,and recommendations are developed specifying changes in the existing process line,aimed at improving the reliability of the finished products. The intention has been to provide reliability inspection and quality control procedures which can be distributed throughout the manufacturing process,replacing the present approach of performing all high-reliability screening at the end of the manufacturing process. The cost and trade-offs of implementing these changes have been analyzed where possible. Where such analysis was not possible, a research schedule was prepared to provide the data necessary for evaluation of the proposed change. The most important of the proposed changes form an integrated concept in which wafers move through an automated production line under computer control.