Synthesis, Characterization and Optical Properties of Barium Titanate Films Sputtered under Various Conditions

摘要

Data is presented on BaTiO3 films which were rf sputtered on Pt, quartz and sapphire substrates at various temperatures and gas mixtures. Measurements of density, dielectric constant, electrical conductivity, X-ray diffraction, energy band gap from optical absorption and wavelength, and temperature dependence of refractive index are presented. Measurements were also made on a BaTiO3 single crystal and a hot-pressed ceramic pellet for direct comparison of bulk properties to those of the films. The results of this work demonstrate that a transition of the properties occurs between the amorphous and crystalline states depending on the surface temperature during sputtering. The transition is sluggish up to 700 C above which crystalline properties of the films appear rapidly. (Author)