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An Investigation of the Techniques of Ellipsometry, Internal Reflection Spectroscopy, and Moment Analysis to the Study of Films and Substrates

机译:椭圆光度法,内反射光谱法和膜片分析法研究薄膜和基材的研究

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摘要

Ellipsometry and internal reflection spectroscopy (IRS) are two methods of spectroscopic measurement which have some unique advantages over other reflection techniques for the study of films and substrates. Applications of these methods are fully discussed for work in the infrared and visible spectral regions. Moment analysis of spectral band shapes has been shown theoretically to yield information on the nature of the intermolecular interactions in condensed phases. These data are vital if concentrations of molecular species are to be found in a film. The experimental difficulties of moment analysis are discussed along with some preliminary results using existing AEDC data. Areas for future research are suggested for the spectroscopic analysis of films. (Author)

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