Method and smart device to determine the substrate optical constant and the film thickness of absorbing-film-absorbing-substrate systems in an absorbing medium using a closed-form formula and reflection ellipsometry

摘要

Seven methods to dynamically characterize in real-time the substrate of absorbing-film absorbing-substrate systems in an absorbing mediums: determine the substrate optical constant or the substrate optical constant and film thickness, depending on the method, using an ellipsometer to measure one or two pairs of the two ellipsometric angles psi and del at one or two angles of incidence and at only one wavelength, and the known film optical constant or film optical constant and film thickness, are provided. Also, seven corresponding methods to design reflection-type film-substrate optical polarization devices: determine the substrate optical constant or the optical constant and film thickness of a film-substrate system to perform as a pre-specified optical polarization device at pre-specified conditions. A software program and/or a smart device to be a part of any ellipsometer or ellipsometer system, or to be added to any existing ellipsometer or ellipsometer system, are also provided.