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RF Magnetron Sputtering of ZnO for SAW (Surface-Acoustic-Wave): Effects of Magnetic Field Strength and Configuration.

机译：用于saW（表面声波）的ZnO射频磁控溅射：磁场强度和结构的影响。

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作者
Anderson, A. C.; Oates, D. E.;
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年度 1982
页码 1-6
总页数 6
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Zinc oxides; Sputtering; Piezoelectric materials; Magnetrons; Deposition; Films; Surface waves; Reprints;

机译：氧化锌;溅射;压电材料;磁控管;沉积;薄膜;表面波;重印;

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2. Magnetic field effects on coating deposition rate and surface morphology coatings using magnetron sputtering [J] . Yang Y.-S., Huang W. Smart Materials & Structures . 2010,第12期

机译：磁场对磁控溅射镀膜沉积速率和表面形貌的影响
3. Effects of sputtering pressure on properties of Al doped ZnO thin films dynamically deposited by rf magnetron sputtering [J] . Zhou H B1, Zhang H Y1, Tan M L2, Materials Research Innovations . 2012,第6期

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4. Influence of Process Parameter and Magnetic Field Strength on DC Magnetron Sputtered ZnO:Al Films From Ceramic Targets [C] . V. Sittinger, W. Dewald, W. Werner, Society of Vacuum Coaters annual technical conference . 2011

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5. Manufacturing gallium doped ZNO thin films suitable for use in thin film transistors using unbalanced magnetron sputtering. [D] . Jones, Timothy R. 2013

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6. Processing and Study of Optical and Electrical Properties of (Mg Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

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7. Effects of the Gas Atmosphere of ZnO Buffer Layers in the ZnO films grown on Si Substrates by RF Magnetron Sputtering [O] . 2005

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8. RF Magnetron Sputtering of ZnO for SAW (Surface-Acoustic-Wave): Effects of Magnetic Field Strength and Configuration [R] . Anderson, A. C., Oates, D. E. 1982

机译：用于saW（表面声波）的ZnO射频磁控溅射：磁场强度和结构的影响

RF Magnetron Sputtering of ZnO for SAW (Surface-Acoustic-Wave): Effects of Magnetic Field Strength and Configuration.

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