Electron-Beam Apparatus for Testing LWIR (Long-Wavelength Infrared) Detectors in a Cryogenically Shielded Environment

摘要

A Scanning Electron Microscope (SEM) has been modified to probe infrared detectors operating in a cryogenically shielded environment. A reduced infrared photon background is obtained by incorporating the SEM objective aperture as part of a liquid helium cooled radiation shield which surrounds the device under test. Use of this equipment will facilitate determination of the response mechanisms of long wavelength detectors to ionizing radiation. Keywords: Radiation effects, Test equipment, Semiconductor devices, Reprints. (jhd)