The paper presents new, CMOS compatible temperature sensors designed for the built-in thermal testing of VLSI circuits. The sensors have been tested by five realizations. Statistical analysis of the measured sensor parameters and the experimental and theoretical investigations in a broad ( -72.5 to +165 degrees C) temperature range are presented. The second part of the paper deals with the application. Experimental results, for example interfacing the sensor with the boundary-scan (BS) test circuitry, on-line thermal monitoring, measuring thermal transients by accessing the sensor via the BS interface, etc., demonstrate the wide usability of the sensor. (C) 1998 Elsevier Science S.A. All rights reserved. [References: 16]
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