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Kinematic design of a redundant parallel mechanism for maskless lithography optical instrument manipulations

机译:用于无掩模光刻光学仪器操纵的冗余并联机构的运动学设计

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摘要

A new precision parallel mechanism having actuation redundancy will be introduced in this paper. Physical contribution of the actuation redundancy for the precision parallel mechanism is reviewed. In addition, several kinematic configurations have been analyzed for degrees of freedom verification and actuation redundancy. A new kinematic configuration which is 4-[PP]PS is suggested. The suggested 4-[PP]PS mechanism which has actuation redundancy provides six degrees of freedom to the mobile platform. For position control and path planning of the mobile platform, the inverse and the forward kinematics are solved for closed-form solutions. In order to verify the inverse and the forward kinematics, a numerical simulation result is presented. In addition to the inverse and forward accuracy proof, the numerical analysis provides other information such as independent translation motion, calibrated rotation arm at tilting motion, and symmetric motion at rotating motion.
机译:本文将介绍一种具有致动冗余的新型精密并联机构。综述了致动冗余对精密并联机构的物理影响。另外,已经针对自由度验证和致动冗余性分析了几种运动学配置。建议一种新的运动学配置,即4- [PP] PS。所建议的具有致动冗余的4- [PP] PS机制为移动平台提供了六个自由度。对于移动平台的位置控制和路径规划,解决了逆向和正向运动学问题,形成了封闭形式的解决方案。为了验证逆向运动学和正向运动学,给出了数值模拟结果。除了逆向和正向精度证明之外,数值分析还提供其他信息,例如独立的平移运动,倾斜运动时的校准旋转臂以及旋转运动时的对称运动。

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