A Multi-step Method for In Situ Mechanical Characterization of 1-D Nanostructures Using a Novel Micromechanical Device

摘要

A novel micromechanical device was developed to convert the compressive force applied by a nanoindenter into pure tensile loading at the sample stages inside a scanning electron microscope or a transmission electron microscope, in order to mechanically deform a one-dimensional nanostructure, such as a nanotube or a nanowire. Force vs. displacement curves for samples with Young's modulus above a threshold value can be obtained independently from readings of a quantitative high resolution nanoindenter with considerable accuracy, using a simple conversion relationship. However, in-depth finite element analysis revealed the existence of limitations for the device when testing samples with relatively low Young's modulus, where forces applied on samples derived from nanoindenter readings using a predetermined force conversion factor will no longer be accurate. In this paper, we will demonstrate a multi-step method which can alleviate this problem and make the device capable of testing a wide range of samples with considerable accuracy.