A simplified equivalent circuit model for the study of squeezed film effects in a capacitive MEMS accelerometer

摘要

A simplified equivalent circuit for the analysis of squeezed film effects in a capacitive MEMS accelerometer is reported in this paper. The reduction of the equivalent circuit is realized by identifying the minimum impedance of the parallel network representing the squeezed film model. The transient and frequency response analysis are carried out in the temperature range of 100K to 400 K, at the pressures of 30Pa, 300Pa and 3000Pa. The results are compared with the experimental and theoretical values reported in literature and the deviations are found to be low as 6% in transient response and less than 5% in the frequency response. It is found that the result of the simplified model agrees well with the detailed model. Due to the circuit reduction, a significant reduction in complexity and computation time is observed.