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Growth and characterization of (La,Sr)(Al,Ta)O-3 single crystals: a promising substrate for GaN epitaxial growth

机译:(La,Sr)(Al,Ta)O-3单晶的生长和表征:GaN外延生长的有前途的衬底

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摘要

Experimental results on the growth and characterization of single crystals of mixed perovskite (La,Sr)(Al,Ta)O-3 (LSAT), a promising material to prepare substrates for GaN epitaxial layers, growth by the Czochralski method, are reported. The single crystals obtained along < 111 > orientation up to 20 min in diameter and 50 mm in length were free of inclusions and macroscopic defects. The optical transmission was measured in the region 200 nm- 3000 mn. For the of < 111 > oriented LSAT single crystals, its measured unit cell parameter (a = 7,730 Angstrom) matches well to the GaN lattice. The chemical composition was checked by electron microprobe analysis. It was found that it is close to the stoichiometric one. With Lang transmission topography growth striations and dislocations were examined. Data on Vickers microhardness, thermal expansion coefficient, etch pit density and temperature dependence of electrical conductivity and capacitance are reported. [References: 12]
机译:报道了混合钙钛矿(La,Sr)(Al,Ta)O-3(LSAT)单晶的生长和表征的实验结果,这是一种通过Czochralski方法生长的有前途的制备GaN外延层衬底的材料。沿<111>取向获得的单晶直径最大为20分钟,长度为50毫米,没有夹杂物和宏观缺陷。在200nm-3000mn的区域中测量了光透射率。对于<111>取向的LSAT单晶,其测得的晶胞参数(a = 7,730埃)与GaN晶格非常匹配。通过电子探针分析检查化学组成。发现它接近化学计量的。使用Lang传输地形检查生长条纹和位错。报告了有关维氏显微硬度,热膨胀系数,刻蚀坑密度以及电导率和电容的温度依赖性的数据。 [参考:12]

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