Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications

摘要

In this paper a 5 x 5 micromachined digital electromagnetic actuator array for microdisplacements is presented. Each elementary actuator is composed of a permanent magnet placed in a silicon square cavity. This magnet can be switched between four discrete positions and can be switched by applying current pulses through wires placed below the cavity. A semi-analytical model has been developed to design the actuator. Then, a prototype, composed of a silicon part, has been manufactured using deep reactive ion etching process. An elementary actuator was as firstly experimentally characterized. Then the array was used to realize a conveyance task. The maximum displacement quantum of the conveyed object is 115 A mu m.