Actuator array with a fluidic drive, blind document display, an electrical 2d - relay, valve array and mirror array with such an actuator array and method for the production of an actuator plate for use for such an actuator array

摘要

The invention relates to a micromechanical actuator array with hydraulic drive, essentially comprising an actuator plate, formed in two-dimensions, with a number of flexible and inflexible regions, arranged in a matrix. The actuator plate encloses a number of pressure chambers of a hydraulic drive and the flexible regions are separated from each other by a first inflexible region and the flexible regions enclose at least one second inflexible region. An external edge of the flexible regions encloses a first surface with a first geometry and a first focal point and an external edge of the second inflexible region encloses a second surface with a second geometry and a second focal point. Furthermore a braille array, a valve array, an electrical relay and a mirror array are produced using the micromechanical actuator array.