METHOD FOR ELECTRICALLY CONNECTING THIN-FILM ELECTRODE OF THIN-FILM ACTUATED MIRROR ARRAY AND CONNECTING TERMINAL ON ACTIVE MATRIX AND PRODUCTION OF THIN-FILM ACTUATED MIRROR ARRAY INCORPORATING THIS METHOD AS WELL AS THIN-FILM ACTUATED MIRROR ARRAY PRODUCED BY THIS PRODUCTION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a method for connecting thin-film electrodes and connecting terminals in the form capable of preventing the short-circuiting between the this-film electrodes which can bas caused by a heat treatment in the production stage therefor. ;SOLUTION: A thin-film sacrificial layer having the gaps to enclose the connecting terminals 214 is deposited on an active matrix 210 and an elastic layer is formed on the surface of the thin-film sacrificial layer contg. the flanks in empty slots. Holes for exposing the connecting terminals 214 are formed therein and the thin-film electrodes 265 are formed thereon to electrically connect to thin-film electrodes 245 and the connecting terminals 214. In succession, the holes are packed with insulating materials. The insulating materials formed on both front and rear surfaces of the electrically deformable thin-film parts formed in the contact holes prevent the short- circuiting between the thin-film electrodes 245 and 265.;COPYRIGHT: (C)1997,JPO