MXN PIECES OF THIN-FILM ACTUATED MIRROR ARRAYS AND THEIR PRODUCTION

摘要

PROBLEM TO BE SOLVED: To increase the angle of inclination of mirrors and to improve the optical efficiency of these mirrors by expanding side part actuators and shrinking central actuators upward when electric field signals are impressed. ;SOLUTION: A driving structural body 421 is provided with the paired side part actuators 430 and central actuators 440. Both ends of the side part actuators 430 are fixed to an active matrix 310. The upper thin-film electrodes 385 of the side part actuators 430 are electrically connected to the lower thin- film electrodes 365 of the central actuators 440 and function as common bias electrodes. The lower thin-film electrodes 365 of the side part actuators 430 are electrically connected to the upper thin-film electrodes 385 of the central actuators 440 and function as signal electrodes. When the electric field signals are impressed on the thin-film actuated mirrors 301, the side part actuators 430 expand and the central actuators 440 shrink upward, thereby increasing the angle of inclination of the mirrors 301.;COPYRIGHT: (C)1998,JPO