Its manufacturing method, a micro-actuator array, micro-actuator device, optical device, display device, exposure apparatus, and device manufacturing method and micro-actuator

摘要

PPROBLEM TO BE SOLVED: To extend lifetime, increase response speed, change only the direction of a driven body with no deformation of the driven body itself, and shorten a settling time, for increased speed of driving. PSOLUTION: Both ends of a plate-like member 2 are fixed to a substrate 1 by way of a leg part 3. The plate-like member 2 can deflect between the portions fixed to the substrate 1. A mirror 4 which is a driven body is locally and mechanically connected to a specified part in the deflectable region of the plate-like member 2 through a connection part 11. A fixed electrode 5 is provided on the substrate 1, in the region facing the central part of the plate-like member 2. A voltage is applied between the fixed electrode 5 and a facing movable electrode of the plate-like member 2 to generate static electricity between them, so that the inclination of the mirror 4 changes with no deformation of the mirror 4 itself. The counter region to the plate-like member 2 of the base body is flattened so that the interval between the substrate and the plate-like member 2 is narrowed. PCOPYRIGHT: (C)2009,JPO&INPIT